Abstract: In semiconductor manufacturing, virtual metrology (VM) leverages high-dimensional sensor data for real-time quality estimation. However, excessive sensor deployment leads to increased ...

Abstract: Self-attention is a cornerstone of modern deep learning, yet its dense dot-product formulation offers limited interpretability and lacks explicit structural constraints. We propose ...

<description>The Prescale Register stores the Value for the prescaler. The cont event gets divided by this value</description> ...