Abstract: In semiconductor manufacturing, virtual metrology (VM) leverages high-dimensional sensor data for real-time quality estimation. However, excessive sensor deployment leads to increased ...

Abstract: Fault detection and diagnosis (FDD) systems play a crucial role in maintaining the adequate execution of the monitored process. One of the widely used data-driven FDD methods is the ...

School of Science, Department of Optoelectronic Science, Harbin Institute of Technology at Weihai, Weihai 264209, P. R. China ...

Department of Neurology, Weill Institute for Neuroscience, University of California San Francisco, San Francisco, California 94158, United States ...